Processing Parameters
Table I

Source Type
Source Size
Part No.
Insert/
Temp
Withdrawal Rate
Stabilize Time
Ramp Time
Min Dep Time
BoronPlus
GS126
2 X .060"
9321
850°C
8 in/min
3 min
10°C/min
30 min
3 X .060"
9330
800
4
5
10
30
100 X 2.0mm
9341A
800
4
8
7
45
125 X 2.5mm
9352A
750
3
12
5
60
150 X 3.0mm
9363A
700
2.5
15
3
60
GS139
2 X .060"
9021
950
8
3
10
30
3 X .060"
9030
900
4
5
10
30
100 X 2.0mm
9041A
850
4
8
7
45
125 X 2.5mm
9052A
750
3
12
5
60
150 X 3.0mm
9063A
700
2.5
15
3
60
GS183
2 X .060"
9121
950
8
3
10
30
3 X .060"
9130
900
4
5
10
30
100 X 2.0mm
9141A
850
4
8
7
45
125 X 2.5mm
9152A
750
3
12
5
60
150 X 3.0mm
9163A
700
2.5
15
3
60
GS245
2 X .060"
9221
950
8
3
10
30
3 X .060"
9230
900
4
5
10
30
100 X 2.0mm
9241A
850
4
8
7
45
125 X 2.5mm
9252A
750
3
12
5
60
150 X 3.0mm
9263A
650
2.5
15
3
60
GS278
2 X .060"
9421
950
8
3
10
30
3 X .060"
9430
900
4
5
10
30
100 X 2.0mm
9441A
850
4
8
7
45
125 X 2.5mm
9452A
750
3
12
5
60
150 X 3.0mm
9463A
650
2.5
15
3
60
PhosPlus
TP250
2 X .060"
7221
750
8
3
10
30
3 X .060"
7230
750
4
5
10
45
100 X 2.0mm
7241A
750
4
8
7
45
125 X 2.5mm
7252A
700
3
12
5
60
150 X 3.0mm
7263A
700
2.5
15
3
60
TP470
2 X .060"
7321
950
8
3
10
30
3 X .060"
7330
850
4
5
10
45
100 X 2.0mm
7341A
800
4
8
7
45
125 X 2.5mm
7352A
750
3
12
5
60
150 X 3.0mm
7363A
700
2.5
15
3
60

 

 

 

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