MEMS Application


Product Bulletins

Moisture-Enhanced Evolution Rate Process Using GS-126 BoronPlus® Sources

Etch Stop Application for BoronPlus Sources

Processing Parameters

Source Preparation: Aging

Carrier Design

Cleaning BoronPlus

Cleaning PhosPlus

Ambient Gases



Process Recommendations

Typical Isolation Process Recommendation Using BoronPlus Sources

Typical Etch Stop Process Recommendation Using BoronPlus Sources

Typical Pholysilicon Gate Process Recommendation Using PhosPlus Sources

Typical Emitter Process Recommendation Using PhosPlus Sources

MEMS Application

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